Properties of the carbon polymer films produced with the help of arc discharge on hollow cathode

被引：0
|
作者：
Eruzin, A.A. [1 ]
Afanas'ev, V.N. [1 ]
Gavrilenko, I.B. [1 ]
Udalov, Yu.P. [1 ]
机构：
[1] Gos. Tekhnol. Inst., Sankt-Peterburg, Russia
来源：
Fizika i Khimiya Obrabotki Materialov | 2003年 / 04期
关键词：
Carbon - Electric arcs - Films - Metals - Substrates;
D O I：
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中图分类号：
学科分类号：
摘要：
Optimal conditions for carbon films deposition on the metal substrates under arc discharge on hollow cathode in acetylene have been determined. The carbon films have a variable composition of 'carbene' material with CH0.25-CH0.8 empirical formula. Obtained dielectric film growth rate is dependent on the substrate material, and an electric resistance of the films is increased with their thickness increase.
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页码：28 / 30
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