NIST workshop on thin dielectric film metrology

被引：0
|
作者：
Belzer, Barbara J.
Ehrstein, James R.
机构：
来源：
Journal of Research of the National Institute of Standards and Technology | 1998年 / 103卷 / 04期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [41] THIN-FILM DIELECTRIC BOLOMETER
    LANCASTER, MC
    MYTTON, RJ
    THIN SOLID FILMS, 1972, 13 (02) : 243 - 253
  • [42] THE THIN FILM CAPACITORS WITH ALN DIELECTRIC
    Pelikanova, Ivana Beshajova
    Cinert, Jakub
    NANOCON 2010, 2ND INTERNATIONAL CONFERENCE, 2010, : 403 - 406
  • [43] Annealing analysis of dielectric thin film
    Wang, Cheng
    Gao, Yan-Jun
    Xiao, Meng-Chao
    Zhang, Gui-Yan
    Qian, Long-Sheng
    Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2005, 13 (01): : 22 - 27
  • [44] SILICON NITRIDE THIN FILM DIELECTRIC
    BARNES, CR
    GEESNER, CR
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1960, 107 (03) : C57 - C57
  • [45] THIN FILM DIELECTRIC MATERIALS FOR MICROELECTRONICS
    ZAININGE.KH
    WANG, CC
    PROCEEDINGS OF THE IEEE, 1969, 57 (09) : 1564 - +
  • [46] STUDY OF FORMATION OF THIN-FILM JOSEPHSON CIRCUITS FOR METROLOGY
    ANDREEV, SI
    MUSTA, TN
    POTAPOV, SV
    YASHINA, TV
    MEASUREMENT TECHNIQUES USSR, 1986, 29 (10): : 973 - 975
  • [47] Theoretical Study on the Bilayer Buckling Technique for Thin Film Metrology
    Jia, Fei
    Zheng, Xiu-Peng
    Cao, Yan-Ping
    Feng, Xi-Qiao
    CMC-COMPUTERS MATERIALS & CONTINUA, 2010, 18 (02): : 105 - 120
  • [48] Thin-film metrology of silicon-on-insulator materials
    Zollner, S
    Lee, TC
    Noehring, K
    Konkar, A
    Theodore, ND
    Huang, WM
    Monk, D
    Wetteroth, T
    Wilson, SR
    Hilfiker, JN
    APPLIED PHYSICS LETTERS, 2000, 76 (01) : 46 - 48
  • [49] Accurate metrology improves thin-film filter yield
    Novak, M
    Zecchino, M
    Novak, E
    LASER FOCUS WORLD, 2001, : 49 - +
  • [50] THIN-FILM BOLOMETER FOR HIGH-FREQUENCY METROLOGY
    BRUNETTI, L
    SENSORS AND ACTUATORS A-PHYSICAL, 1992, 32 (1-3) : 423 - 427
12345