Influence of the PACVD process parameters on the properties of titanium carbide thin films

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作者：
Jarms, C.
Stock, H.-R.
Berndt, H.
Bartsch, K.
Leonhardt, A.
Arnold, B.
机构：
[1] Stift. Inst. fur Werkstofftechnik, D-28359 Bremen, Germany
[2] Inst. Festkorper- und W., D-01171 Dresden, Germany
来源：
Surface and Coatings Technology | 1998年 / 98卷 / 1-3期
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页码：1547 / 1552
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