Deposition of titanium oxide and titanium carbide containing thin carbon films in a plasma activated process

被引：0
|
作者：
Universitaet Hamburg, Hamburg, Germany [1 ]
机构：
来源：
Diamond Relat Mater | / 2卷 / 500-503期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] Deposition of titanium oxide and titanium carbide containing thin carbon films in a plasma activated process
    Stricker, A
    Luithardt, W
    Benndorf, C
    DIAMOND AND RELATED MATERIALS, 1999, 8 (2-5) : 500 - 503
  • [2] Deposition of titanium carbide films from mixed carbon and titanium plasma streams
    DelplanckeOgletree, MP
    Monteiro, OR
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1997, 15 (04): : 1943 - 1950
  • [3] Deposition of titanium carbide films from mixed carbon and titanium plasma streams
    Universite Libre de Bruxelles, Brussels, Belgium
    J Vac Sci Technol A, 4 (1943-1950):
  • [4] Hybrid Deposition of Titanium Carbide Thin Films
    Kadlec, J.
    Joska, Z.
    Pokorny, Z.
    Jelinek, M.
    Kocourek, T.
    ADVANCED BATTERIES, ACCUMULATORS AND FUEL CELLS (ABAF 11), 2011, 32 (01): : 73 - 77
  • [5] Characterization of a magnetron plasma for deposition of titanium oxide and titanium nitride films
    Hippler, R
    Wrehde, S
    Stranák, V
    Zhigalov, O
    Steffen, H
    Tichy, M
    Quaas, M
    Wulff, H
    CONTRIBUTIONS TO PLASMA PHYSICS, 2005, 45 (5-6) : 348 - 357
  • [6] Hot target magnetron sputtering process: Effect of infrared radiation on the deposition of titanium and titanium oxide thin films
    Graillot-Vuillecot, Robin
    Thomann, Anne-Lise
    Lecas, Thomas
    Cachoncinlle, Christophe
    Millon, Eric
    Caillard, Amael
    VACUUM, 2020, 181
  • [7] Room temperature deposition of titanium carbide thin films using dense plasma focus device
    Rawat, RS
    Lee, P
    White, T
    Ying, L
    Lee, S
    SURFACE & COATINGS TECHNOLOGY, 2001, 138 (2-3): : 159 - 165
  • [8] Optical properties of tungsten and titanium oxide thin films prepared by plasma sputter deposition
    Huang, CC
    Tang, JC
    Tao, WH
    SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2004, 83 (01) : 15 - 28
  • [9] THIN FILMS OF TITANIUM + TITANIUM OXIDE FOR MICROMINIATURIZATION
    HUBER, F
    IEEE TRANSACTIONS ON COMPONENT PARTS, 1964, CP11 (02): : 38 - &
  • [10] Titanium carbide/carbon composite nanofibers prepared by a plasma process
    El Mel, A. A.
    Gautron, E.
    Choi, C. H.
    Angleraud, B.
    Granier, A.
    Tessier, P. Y.
    NANOTECHNOLOGY, 2010, 21 (43)
12345