Planarization technology for Josephson integrated circuits.

被引：0

作者：

Nagasawa, S. ^{[1
]}

Tsuge, H. ^{[1
]}

Wada, Y. ^{[1
]}

机构：

[1] NEC, Kawasaki, Jpn

来源：

Electron device letters | 1988年 / 9卷 / 08期

关键词：

ETCH-BACK PLANARIZATION TECHNOLOGY - JOSEPHSON IC - MAGNETIC COUPLED GATES - MULTILEVEL LAYER STRUCTURE;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：414 / 416

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