Planarization technology for Josephson integrated circuits.

被引：0
|
作者：
Nagasawa, S. [1 ]
Tsuge, H. [1 ]
Wada, Y. [1 ]
机构：
[1] NEC, Kawasaki, Jpn
来源：
Electron device letters | 1988年 / 9卷 / 08期
关键词：
ETCH-BACK PLANARIZATION TECHNOLOGY - JOSEPHSON IC - MAGNETIC COUPLED GATES - MULTILEVEL LAYER STRUCTURE;
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页码：414 / 416
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