Development of the micromilling process for high-aspect-ratio microstructures

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Louisiana Tech Univ, Ruston, United States [1 ]
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J Microelectromech Syst | / 1卷 / 33-38期
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Manuscript received June 15; 1995; revised September 7; 1995. Subject Editor; H. Miura. This work was supported in part by Air Force Office of Scientific Research grant F49620-93-1-0547. The authors arc with the Institute for Micromanufacturing; Louisiana Tech University; Ruston; LA 71272 USA. Publisher Item Identifier S 1057-7157(96)00S78-5;
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