Role of oxygen in metal silicide formation and properties

被引：0
|
作者：
Murarka, S.P. [1 ]
机构：
[1] Ctr. Adv. Interconnect Sci. Technol., Rensselaer Polytechnic Institute, Troy, NY 12180, United States
来源：
Solid State Phenomena | 2000年 / 71卷
关键词：
Silicides;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
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页码：119 / 146
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