Tribological properties of titanium nitride films prepared by dynamic ion beam mixing method

被引：0
|
作者：
Nagasaka, H. [1 ]
Chayahara, A. [1 ]
Fujii, K. [1 ]
机构：
[1] Ebara Research Co, Ltd, Fujisawa-shi, Japan
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1997年 / 121卷 / 1-4期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：279 / 282
相关论文
共 50 条
  • [21] The characteristcs of TiCrN film prepared by the dynamic ion beam mixing method
    Nagasaka, H
    Yamakawa, T
    Kataoka, T
    Kakutani, M
    Takeuchi, T
    Murakami, Y
    Fujita, Y
    THERMEC'2003, PTS 1-5, 2003, 426-4 : 2569 - 2574
  • [22] COMPOSITION AND STRUCTURE OF TITANIUM NITRIDE FILMS PREPARED BY ION-BEAM ENHANCED DEPOSITION
    WANG, X
    LIU, XH
    CHEN, YS
    YANG, GQ
    ZHOU, ZY
    ZHENG, ZH
    HUANG, W
    ZOU, SC
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 59 : 272 - 275
  • [23] Tribological and corrosive properties of silver thin films prepared by e-beam ion plating method
    Lee, KH
    Takai, O
    Lee, MH
    SURFACE & COATINGS TECHNOLOGY, 2003, 169 : 695 - 698
  • [24] COATING FILMS OF TITANIUM NITRIDE PREPARED BY ION AND VAPOR DEPOSITION METHOD.
    Satou, Mamoru
    Andoh, Yasunori
    Ogata, Kiyoshi
    Suzuki, Yasuo
    Matsuda, Koji
    Fujimoto, Fuminori
    1600, (24):
  • [25] COATING FILMS OF TITANIUM NITRIDE PREPARED BY ION AND VAPOR-DEPOSITION METHOD
    SATOU, M
    ANDOH, Y
    OGATA, K
    SUZUKI, Y
    MATSUDA, K
    FUJIMOTO, F
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1985, 24 (06): : 656 - 660
  • [26] Electronic structures of titanium oxide films grown by dynamic ion beam mixing
    Key Lab. of Radiation Physics and Technology of Education Ministry of China, Institute of Nuclear Science and Technology, Sichuan University, Chengdu 610064, China
    Zhenkong Kexue yu Jishu Xuebao, 2007, 3 (241-245):
  • [27] TITANIUM NITRIDE FILMS PREPARED BY ION-IMPLANTATION
    CHEN, PA
    YANG, TT
    THIN SOLID FILMS, 1981, 81 (01) : L91 - L92
  • [28] MECHANICAL-PROPERTIES OF SIC FILMS PREPARED BY DYNAMIC ION MIXING
    RIVIERE, JP
    ZAYTOUNI, M
    DELAFOND, J
    SURFACE & COATINGS TECHNOLOGY, 1994, 67 (1-2): : 43 - 49
  • [29] Aluminium nitride thin films prepared by ion beam assisted deposition method
    Watanabe, Y
    SURFACE MODIFICATION TECHNOLOGIES XI, 1998, : 814 - 825
  • [30] Microstructure and tribological properties of molybdenum film deposited by ion beam mixing method
    Zhang, Wei
    Xue, Qunji
    Zhang, Xushou
    Cailiao Baohu/Materials Protection, 1997, 30 (04): : 6 - 8
12345