COATING FILMS OF TITANIUM NITRIDE PREPARED BY ION AND VAPOR DEPOSITION METHOD.

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作者：
Satou, Mamoru [1 ]
Andoh, Yasunori [1 ]
Ogata, Kiyoshi [1 ]
Suzuki, Yasuo [1 ]
Matsuda, Koji [1 ]
Fujimoto, Fuminori [1 ]
机构：
[1] Government Industrial Research Inst, Ikeda, Jpn, Government Industrial Research Inst, Ikeda, Jpn
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| 1600年 / 24期
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