Investigation on titanium nitride thin films prepared by ion beam enhanced deposition

被引：0
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作者：
Xiang, Wei [1 ]
Lai, Zuwu [1 ]
Luo, Siwei [1 ]
Fang, Renchang [1 ]
Li, Wenzhi [1 ]
机构：
[1] China Acad of Engineering Physics, Chengdu, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Vacuum Science and Technology | 1998年 / 18卷 / 04期
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(Edited Abstract)
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页码：308 / 312
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