共 50 条
- [41] Strain evaluation of plasma-deposited silicon nitride Commad 04: 2004 Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, 2005, : 97 - 100
- [45] Calculation of Stresses in Plasma-Deposited Amorphous Metallic Coatings Glass Physics and Chemistry, 2003, 29 : 310 - 315
- [50] Properties of plasma-deposited hydrogenated amorphous silicon prepared under visible-light illumination Denshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory, 1993, 57 (07): : 71 - 80