SENSORS IN SILICON.

被引：0

作者：

Allan, Roger

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来源：

High Technology (Boston) | 1984年 / 4卷 / 09期

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摘要：

SENSORS

引用

页码：43 / 50

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Dobson, P.S.
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Hugot
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[24] Low Valent Silicon.
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Garfunkel, E
Lu, HC
Gustafsson, T
Green, M
Alers, G
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1999, 218 : U463 - U463
[26] FORMATION OF SUBMICRON GROOVES IN SILICON.
Riseman, J.
1600, (26):
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1600, (51):
[29] PHOSPHORUS DIFFUSION IN POLYCRYSTALLINE SILICON.
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Trabka, E.A.
Lee, S.-T.
Jarman, C.M.
1600, (55):
[30] ON THE PRODUCTION OF DIFFUSED LAYERS IN SILICON.
Sharma, R.S.
1973, 19 (02): : 63 - 71