A Design Flow for Micromachined Electromechanical Systems

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作者：
Swart, Nicholas R. [1 ,2 ]
机构：
[1] National Optics Institute, Sainte-Foy, Que., Canada
[2] Analog Devices, 21 Osborn St., Cambridge, MA 02139-3556, United States
来源：
IEEE Design and Test of Computers | / 16卷 / 04期
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页码：39 / 47
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