Electromechanical analysis of a micromachined comb-drive actuator by admittance measurement

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作者：
Faculty of Engineering, Kagawa University, 2217-20 Hayashi-cho, Takamatsu 761-0396 [1 ]
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来源：
IEEJ Trans. Sens. Micromach. | 2006年 / 7卷 / 281-285期
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D O I：
10.1541/ieejsmas.126.281
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