RAPID NONDESTRUCTIVE THICKNESS MEASUREMENT OF OPAQUE THIN FILMS ON ANISOTROPIC SUBSTRATES.

被引：0

作者：

Crean, G.M. ^{[1
]}

Waintal, A. ^{[1
]}

机构：

[1] CNET, Meylan, Fr, CNET, Meylan, Fr

来源：

Electronics Letters | 1986年 / 22卷 / 01期

关键词：

ANISOTROPIC SUBSTRATES - NONDESTRUCTIVE THICKNESS MEASUREMENT - OPAQUE THIN FILMS - RUTHERFORD BACKSCATTERING;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：53 / 54

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