RAPID NONDESTRUCTIVE THICKNESS MEASUREMENT OF OPAQUE THIN FILMS ON ANISOTROPIC SUBSTRATES.

被引：0
|
作者：
Crean, G.M. [1 ]
Waintal, A. [1 ]
机构：
[1] CNET, Meylan, Fr, CNET, Meylan, Fr
来源：
Electronics Letters | 1986年 / 22卷 / 01期
关键词：
ANISOTROPIC SUBSTRATES - NONDESTRUCTIVE THICKNESS MEASUREMENT - OPAQUE THIN FILMS - RUTHERFORD BACKSCATTERING;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：53 / 54
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