Barrier behaviour of TiW between copper and aluminium

被引：0
|
作者：
Krautz, H. [1 ]
Wenzel, Ch. [1 ]
Bornkessel, K. [1 ]
Blasek, G. [1 ]
机构：
[1] Technische Univ Dresden, Germany
来源：
Physica Status Solidi (A) Applied Research | 1988年 / 110卷 / 02期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Integrated Circuits, VLSI
引用
收藏
相关论文
共 50 条
  • [41] Tantalum and niobium as a diffusion barrier between copper and silicon
    Jang, SY
    Lee, SM
    Baik, HK
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 1996, 7 (04) : 271 - 278
  • [42] The influence of artificial ageing on the corrosion behaviour of a 2050 aluminium-copper-lithium alloy
    Proton, Vincent
    Alexis, Joel
    Andrieu, Eric
    Delfosse, Jerome
    Deschamps, Alexis
    De Geuser, Frederic
    Lafont, Marie-Christine
    Blanc, Christine
    CORROSION SCIENCE, 2014, 80 : 494 - 502
  • [43] Effect of sulfide on the stress corrosion behaviour of a copper-aluminium alloy in saline water
    Ashour, EA
    JOURNAL OF MATERIALS SCIENCE, 2001, 36 (01) : 201 - 205
  • [44] THE ACCELERATED CORROSION BEHAVIOUR IN SALINE ENVIRONMENTS OF SOME SAMPLES MADE OF TOMBAC, COPPER AND ALUMINIUM
    Hagioglu, Petrica
    Gheorghies, Constantin
    Cantaragiu, Alina Mihaela
    Moisa, Strul
    JOURNAL OF SCIENCE AND ARTS, 2010, (01): : 153 - 160
  • [45] Effect of sulfide on the stress corrosion behaviour of a copper-aluminium alloy in saline water
    E. A. Ashour
    Journal of Materials Science, 2001, 36 : 201 - 205
  • [46] Electromotive behaviour of aluminium
    De Gruyter, CJ
    RECUEIL DES TRAVAUX CHIMIQUES DES PAYS-BAS, 1925, 44 : 937 - 969
  • [47] The behaviour of aluminium anodes
    Schulze, G
    ANNALEN DER PHYSIK, 1906, 21 (15) : 929 - 954
  • [48] ON THE MAGNETIC BEHAVIOUR OF ALUMINIUM AND ALUMINIUM SOLID SOLUTIONS
    LINGELBACH, R
    VOGT, E
    ACTA METALLURGICA, 1959, 7 (07): : 441 - 445
  • [49] HARDNESS REVERSION OF DILUTE ALUMINIUM COPPER AND ALUMINIUM COPPER MAGNESIUM ALLOYS
    BETON, RH
    ROLLASON, EC
    JOURNAL OF THE INSTITUTE OF METALS, 1957, 86 (02): : 77 - 85
  • [50] HARDNESS REVERSION OF DILUTE ALUMINIUM COPPER AND ALUMINIUM COPPER MAGNESIUM ALLOYS
    GRAF, R
    BETON, RH
    ROLLASON, EC
    JOURNAL OF THE INSTITUTE OF METALS, 1958, 86 (13): : 534 - 535
12345