Experimental apparatus for growth of SiC thin film using CO2 laser radiation

被引：0
|
作者：
Honda, Hikaru
Abe, Toshimi
机构：
来源：
Tohoku Kogyo Daigaku Kiyo, 1: Rikogakuhen | 1989年 / 09期
关键词：
Lasers; Carbon Dioxide - Semiconducting Films--Laser Applications - Semiconducting Silicon Compounds--Growth;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A vacuum chamber was made with 304 stainless steel. The experimental apparatus consists of a substrate heating oven with a holder, an electrical feed-through, an ionization gauge, an infrared window and a specimen source holder. Temperature of the holder can be increased up to 1200°C by heating the oven in a vacuum of the order of 10-8 Torr. When the growth of SiC films by the laser radiation is carried out on heated Si substrate (1000-1200°C), this oven can be used as the substrate heating tool.
引用
收藏
页码：145 / 149
相关论文
共 50 条
  • [21] Experimental Study of Micromachining on Borosilicate Glass Using CO2 Laser
    Posa, Vishnu Vardhan
    Sundaram, Murali
    JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME, 2021, 143 (05):
  • [22] Fabrication and property of titanium dioxide thin film using sol-gel method and CO2 laser annealing
    Chung, C. -K.
    Lin, S. L.
    Chuang, K. P.
    Cheng, S. Y.
    Shei, K. Y.
    MICRO & NANO LETTERS, 2012, 7 (08): : 701 - 704
  • [23] SAFETY STUDY OF AN EXPERIMENTAL APPARATUS FOR EXTRACTION WITH SUPERCRITICAL CO2
    Soares, V. B.
    Coelho, G. L. V.
    BRAZILIAN JOURNAL OF CHEMICAL ENGINEERING, 2012, 29 (03) : 677 - 682
  • [24] A review of experimental apparatus for supercritical CO2 fracturing of shale
    Zhang, Xiufeng
    Zhu, Wancheng
    Xu, Zenghe
    Liu, Shuyuan
    Wei, Chenhui
    JOURNAL OF PETROLEUM SCIENCE AND ENGINEERING, 2022, 208
  • [25] Adsorption of CO2 on a PdO(101) Thin Film
    Hinojosa, Jose A., Jr.
    Antony, Abbin
    Hakanoglu, Can
    Asthagiri, Aravind
    Weaver, Jason F.
    JOURNAL OF PHYSICAL CHEMISTRY C, 2012, 116 (04): : 3007 - 3016
  • [26] Microhole Formation Behavior of Polypropylene Film Using CO2 Laser Irradiation
    Winotapun, Charinee
    Watcharosin, Utaiwan
    Kerddonfag, Noppadon
    Chinsirikul, Wannee
    Takarada, Wataru
    Kikutani, Takeshi
    JOURNAL OF FIBER SCIENCE AND TECHNOLOGY, 2017, 73 (10): : 240 - 250
  • [27] Laser-triggered current gating based on photothermal effect in VO2 thin-film device using CO2 laser
    Kim, Jihoon
    Jeong, Sun Jae
    Kim, Bong-Jun
    Lee, Yong Wook
    APPLIED PHYSICS B-LASERS AND OPTICS, 2018, 124 (04):
  • [28] Laser-triggered current gating based on photothermal effect in VO2 thin-film device using CO2 laser
    Jihoon Kim
    Sun Jae Jeong
    Bong-Jun Kim
    Yong Wook Lee
    Applied Physics B, 2018, 124
  • [29] Interaction of pulsed CO and CO2 laser radiation with rocks
    Graves, RM
    Ionin, AA
    Klimachev, YM
    Mukhamedgalieva, AF
    O'Brien, DG
    Sinitsyn, DV
    Zvorykin, VD
    HIGH-POWER LASER ABLATION III, 2000, 4065 : 602 - 613
  • [30] The structure of dielectric β-SiC thin films of hollow glass waveguide for CO2 laser power delivery
    Li, KY
    Zhang, Q
    Zhou, GY
    Hou, LT
    INFRARED PHYSICS & TECHNOLOGY, 2002, 43 (06) : 361 - 365
12345