Self-interstitial related reactions in silicon irradiated by light ions

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作者：
Mukashev, B.N. [1 ]
Abdullin, Kh.A. [1 ]
Gorelkinskii, Yu.V. [1 ]
Tokmoldin, S.Zh. [1 ]
机构：
[1] Institute of Physics and Technology, Ministry of Science, Academy of Sciences of the Republic Kazakhstan, 480082 Almaty, Kazakhstan
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Materials Science and Engineering B: Solid-State Materials for Advanced Technology | / 58卷 / 01期
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页码：171 / 178
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