Advanced materials analysis techniques for nanoelectronics

被引：0
|
作者：
Kubodera, Ken'ichi [1 ]
Maruo, Tetsuya [1 ]
Kurosawa, Satoru [1 ]
Ikeda, Kousuke [1 ]
机构：
[1] NTT Interdisciplinary Laboratories
来源：
NTT R and D | 1996年 / 45卷 / 03期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：261 / 264
相关论文
共 50 条
  • [21] Materials Research and Advanced Techniques: Editorial
    Petzow, Günter
    Zeitschrift fuer Metallkunde/Materials Research and Advanced Techniques, 2002, 93 (05):
  • [22] Advanced analysis techniques
    不详
    X-RAY SCATTERING FROM SOFT-MATTER THIN FILMS, 1999, 148 : 75 - 89
  • [23] Scanning probe microscopy for advanced nanoelectronics
    Fei Hui
    Mario Lanza
    Nature Electronics, 2019, 2 : 221 - 229
  • [24] Advanced metrology needs for nanoelectronics lithography
    Knight, Stephen
    Dixson, Ronald
    Jones, Ronald L.
    Lin, Eric K.
    Orji, Ndubuisi G.
    Silver, R.
    Villarrubia, John S.
    Vladar, Andras E.
    Wu, Wen-li
    COMPTES RENDUS PHYSIQUE, 2006, 7 (08) : 931 - 941
  • [25] Scanning probe microscopy for advanced nanoelectronics
    Hui, Fei
    Lanza, Mario
    NATURE ELECTRONICS, 2019, 2 (06) : 221 - 229
  • [26] The molecular cluster-materials for nanoelectronics
    Gubin, SP
    Kislov, VV
    Kolesov, VV
    Soldatov, ES
    Trifonov, AS
    NANOSTRUCTURED MATERIALS, 1999, 12 (5-8): : 1131 - 1134
  • [27] Carbon-based materials in nanoelectronics
    Mastrogiovanni, Dan
    Feng, Wenchun
    Feldman, Len
    He, Huixin
    Podzorov, Vitaly
    Gustafsson, Torgny
    Garfunkel, Eric
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2012, 244
  • [28] Metrology (including materials characterization) for nanoelectronics
    Diebold, A. C.
    Price, J.
    Hung, P. Y.
    TESTING , RELIABILITY, AND APPLICATION OF MICRO-AND NANO-MATERIAL SYTEMS IV, 2006, 6175 : U101 - U105
  • [29] Nanoelectronics and Nanospintronics: Fundamentals and Materials Perspective
    Wang, Kang L.
    Ovchinnikov, Igor V.
    Materials Science Forum, 2009, 608 : 133 - 158
  • [30] Molecular cluster-materials for nanoelectronics
    Gubin, S.P.
    Kislov, V.V.
    Kolesov, V.V.
    Soldatov, E.S.
    Trifonov, A.S.
    Nanostructured Materials, 1999, 12 (05): : 1131 - 1134
12345