Effect of the substrate temperature on the structure and electric properties of Cr-Si-O films

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Einfluss der Substrattemperatur auf Struktur und elektrische Eigenschaften von Cr-Si-O Schichten
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[1] van Loyen, L.
[2] Sobe, G.
[3] Weise, G.
[4] Heinrich, A.
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van Loyen, L. | 1600年 / 187期
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