Characterizing and modeling the apparent anomalous behavior of resistivity in Cr-Si-O thin films

被引:0
|
作者
Lawrence Livermore Natl Lab, Livermore, United States [1 ]
机构
来源
Thin Solid Films | / 1-2卷 / 272-276期
关键词
Number:; -; Acronym:; LLNL; Sponsor: Lawrence Livermore National Laboratory;
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [1] Characterizing and modeling the apparent anomalous behavior of resistivity in Cr-Si-O thin films
    Jankowski, AF
    THIN SOLID FILMS, 1998, 332 (1-2) : 272 - 276
  • [2] Resistance behavior of Cr-Si-O thin films
    Jankowski, AF
    Hayes, JP
    Musket, R
    Cosandey, F
    Gorla, CE
    Besser, RS
    Westerlind, V
    Cobai, G
    CHEMISTRY AND PHYSICS OF NANOSTRUCTURES AND RELATED NON-EQUILIBRIUM MATERIALS, 1997, : 211 - 219
  • [3] PHASE FORMATION IN THIN-FILMS OF THE SYSTEM CR-SI-O
    SOBE, G
    BAUER, HD
    HENKE, J
    HEINRICH, A
    SCHREIBER, H
    GROTZSCHEL, R
    JOURNAL OF THE LESS-COMMON METALS, 1991, 169 (02): : 331 - 345
  • [4] PROPERTIES OF HIGH-RESISTIVITY CR-SI-O THIN-FILM RESISTOR
    NARIZUKA, Y
    KAWAHITO, T
    KAMEI, T
    KOBAYASHI, S
    IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1988, 11 (04): : 433 - 438
  • [5] ELECTRICAL TRANSPORT-PROPERTIES OF HIGH-RESISTANCE CR-SI-O THIN-FILMS
    GLADUN, C
    HEINRICH, A
    LANGE, F
    SCHUMANN, J
    VINZELBERG, H
    THIN SOLID FILMS, 1985, 125 (1-2) : 101 - 106
  • [6] INTERDIFFUSION AND REACTION IN (CR-SI)/AL AND (CR-SI-O)/AL THIN-FILM SYSTEMS
    BATHER, KH
    ZIES, G
    VOIGTMANN, R
    MOLDENHAUER, W
    SCHREIBER, H
    THIN SOLID FILMS, 1990, 188 (01) : 67 - 83
  • [7] Effect of the substrate temperature on the structure and electric properties of Cr-Si-O films
    Einfluss der Substrattemperatur auf Struktur und elektrische Eigenschaften von Cr-Si-O Schichten
    van Loyen, L., 1600, (187):
  • [8] THE PROPERTIES OF CR-SI-O THIN-FILM RESISTORS BY DC CONVENTIONAL SPUTTERING
    FURUTA, K
    MIYAGAWA, S
    KAMEI, T
    ANDO, H
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (03): : 1565 - 1566
  • [9] Integrated phase equilibria experimental study and thermodynamic modeling of the Cr-Si-O, Fe-Cr-O and Fe-Cr-Si-O systems
    Shevchenko, Maksym
    Shishin, Denis
    Jak, Evgueni
    CERAMICS INTERNATIONAL, 2022, 48 (22) : 33418 - 33439
  • [10] INFLUENCE OF SUBSTRATE-TEMPERATURE ON STRUCTURE AND ELECTRICAL-PROPERTIES OF CR-SI-O FILMS
    VANLOYEN, L
    SOBE, G
    WEISE, G
    HEINRICH, A
    JOURNAL OF ALLOYS AND COMPOUNDS, 1992, 187 (02) : 363 - 372