Wear resistance and optical properties of TiN thin films prepared by ion beam mixing

被引：0
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作者：
Yan, Pengxun [1 ]
Yang, Size [1 ]
机构：
[1] Lanzhou Univ, Lanzhou, China
来源：
He Jishu/Nuclear Techniques | 1994年 / 17卷 / 02期
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页码：74 / 77
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