PROPERTIES OF INDIUM OXIDE TIN OXIDE MULTILAYERED FILMS PREPARED BY ION-BEAM SPUTTERING

被引：8
|
作者：
SUZUKI, T
YAMAZAKI, T
ODA, H
机构：
[1] Tokyo Univ of Agriculture, Japan
来源：
JOURNAL OF MATERIALS SCIENCE | 1988年 / 23卷 / 08期
关键词：
Indium Oxide-Thin Oxide Films - Indium Tin Oxide - Ion Beam Sputtering - Multilayered Films - Optoelectrical Properties - X-Ray Diffraction;
D O I：
10.1007/BF00547485
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：3026 / 3030
页数：5
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