Design and fabrication of microsensors using standard CMOS IC process

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作者：
Dai, Ching-Liang [1 ]
Chang, Pei-Zen [1 ]
Wang, Jiann-Jenn [1 ]
机构：
[1] Natl Taiwan Univ, Taipei, Taiwan
来源：
Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao | 1997年 / 18卷 / 03期
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页码：283 / 291
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