Low-ohmic contacts by excimer laser annealing of implanted polysilicon

被引：0
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作者：
Ren, Q.W. [1 ]
van den Berg, M.R. [1 ]
Nanver, L.K. [1 ]
Slabbekoorn, J. [1 ]
Visser, C.C.G. [1 ]
机构：
[1] Delft Univ of Technology, Delft, Netherlands
来源：
International Conference on Solid-State and Integrated Circuit Technology Proceedings | 1998年
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页码：102 / 105
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