Characterization of oxygen and carbon in undoped AlGaAs grown by organometallic vapor-phase epitaxy

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作者：
Kakinuma, Hiroaki [1 ]
Mohri, Mikio [1 ]
Akiyama, Masahiro [1 ]
机构：
[1] Oki Electric Industry Co, Ltd, Tokyo, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1997年 / 36卷 / 1 A期
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页码：23 / 28
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