Characterization of oxygen and carbon in undoped AlGaAs grown by organometallic vapor-phase epitaxy

被引：0

作者：

Kakinuma, Hiroaki ^{[1
]}

Mohri, Mikio ^{[1
]}

Akiyama, Masahiro ^{[1
]}

机构：

[1] Oki Electric Industry Co, Ltd, Tokyo, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1997年 / 36卷 / 1 A期

关键词：

D O I：

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摘要：

引用

页码：23 / 28

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