共 50 条
- [24] Preparation of transparent alumina thin films deposited by RF magnetron sputtering JOURNAL OF METALS MATERIALS AND MINERALS, 2021, 31 (02): : 96 - 103
- [25] Synthesis and characterization of inorganic silicon oxycarbide glass thin films by reactive rf-magnetron sputtering JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2007, 25 (01): : 153 - 159
- [26] Measurements for nanocrystals in silicon deposited by rf-magnetron sputtering COMPOUND SEMICONDUCTORS 2004, PROCEEDINGS, 2005, 184 : 409 - 413
- [27] Study of silicon oxynitride film deposited by RF magnetron sputtering Guangxue Xuebao/Acta Optica Sinica, 2005, 25 (04): : 567 - 571