Optical characterization of low-energy nitrogen-ion doped GaAs

被引：0
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作者：
Shima, Takayuki [1 ]
Makita, Yunosuke [1 ]
Kimura, Shinji [1 ]
Iida, Tsutomu [1 ]
Sanpei, Hirokazu [1 ]
Yamaguchi, Misao [1 ]
Kudo, Kazuhiro [1 ]
Tanaka, Kuniaki [1 ]
Kobayashi, Naoto [1 ]
Sandhu, Adarsh [1 ]
Hoshino, Yasushi [1 ]
机构：
[1] Electrotechnical Lab, Tsukuba, Japan
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1997年 / 127-128卷
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摘要：
15
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页码：437 / 441
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