Deep 3-D structures produced by soft x-ray lithography

被引：0
|
作者：
Dance, Brian
机构：
来源：
Semiconductor International | 1997年 / 20卷 / 06期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：217 / 218
相关论文
共 50 条
  • [1] Sloped irradiation techniques in deep X-ray lithography for 3-D shaping of microstructures
    Feiertag, G
    Ehrfeld, W
    Lehr, H
    Schmidt, M
    [J]. EMERGING LITHOGRAPHIC TECHNOLOGIES, 1997, 3048 : 136 - 145
  • [2] Moving mask deep X-ray lithography system with multi stage for 3-D microfabrication
    O. Tabata
    H. You
    N. Matsuzuka
    T. Yamaji
    S. Uemura
    I. Dama
    [J]. Microsystem Technologies, 2002, 8 (2) : 93 - 98
  • [3] Moving mask deep X-ray lithography system with multi stage for 3-D microfabrication
    Tabata, O
    You, H
    Matsuzuka, N
    Yamaji, T
    Uemura, S
    Dama, I
    [J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2002, 8 (2-3): : 93 - 98
  • [4] A novel fabrication process of 3-D microstructures by double exposure in standard deep x-ray lithography
    Matsuzuka, N
    Hirai, Y
    Tabata, O
    [J]. MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2004, : 681 - 684
  • [5] LILIT beamline for soft and deep X-ray lithography at Elettra
    Romanato, F
    Di Fabrizio, E
    Vaccari, L
    Altissimo, M
    Cojoc, D
    Businaro, L
    Cabrini, S
    [J]. MICROELECTRONIC ENGINEERING, 2001, 57-8 : 101 - 107
  • [6] X-RAY CRYSTALLOGRAPHY - 3-D STRUCTURES BY OPTICAL COMPUTING
    MAUGH, TH
    [J]. SCIENCE, 1977, 195 (4276) : 384 - 384
  • [7] Fabrication of 3D photonic crystal by deep X-ray lithography
    Liu, Gang
    Tian, Yangchao
    Xiong, Ying
    Kan, Ya
    [J]. MICROMACHING TECHNOLOGY FOR MICRO-OPTICS AND NANO-OPTICS IV, 2006, 6110
  • [8] Soft X-ray projection lithography
    Kinoshita, Hiroo
    Kurihara, Kenji
    Takenaka, Hisataka
    Mizota, Tsutomu
    Haga, Tuneyuki
    Ishii, Yoshikazu
    [J]. NTT R and D, 1994, 43 (11): : 1221 - 1228
  • [9] Deep sub micron high aspect ratio polymer structures produced by hard X-ray lithography
    Achenbach, S
    [J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2004, 10 (6-7): : 493 - 497
  • [10] Deep sub micron high aspect ratio polymer structures produced by hard X-ray lithography
    S. Achenbach
    [J]. Microsystem Technologies, 2004, 10 : 493 - 497
12345