Localized and ultrahigh-rate etching of silicon wafers using atmospheric-pressure microplasma jets

被引：0
|
作者：
Ichiki, Takanori [1 ,2 ]
Taura, Ryo [1 ]
Horiike, Yasuhiro [3 ]
机构：
[1] Dept. of Elec. and Electronic Eng., Toyo University, 2100 Kujirai, Kawagoe, Saitama 350-8585, Japan
[2] PRESTO, Japan Science and Technology Agency, Kawaguchi Ctr Bldg 1-8 Honcho 4chome, Kawaguchi City, 332-0012, Japan
[3] Department of Materials Science, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
来源：
Journal of Applied Physics | 2004年 / 95卷 / 01期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
(Edited Abstract)
引用
收藏
页码：35 / 39
相关论文
共 50 条
  • [21] Investigation on Localized Etching Behaviors of Polymer Film by Atmospheric Pressure Plasma Jets
    Tao Wang
    Xin Wang
    Jiahao Wang
    Shengquan Wang
    Weizhi Yang
    Meng Li
    Liping Shi
    Plasma Chemistry and Plasma Processing, 2023, 43 : 679 - 696
  • [22] Investigation on Localized Etching Behaviors of Polymer Film by Atmospheric Pressure Plasma Jets
    Wang, Tao
    Wang, Xin
    Wang, Jiahao
    Wang, Shengquan
    Yang, Weizhi
    Li, Meng
    Shi, Liping
    PLASMA CHEMISTRY AND PLASMA PROCESSING, 2023, 43 (03) : 679 - 696
  • [23] Polystyrene Surface Modification for Localized Cell Culture Using a Capillary Dielectric Barrier Discharge Atmospheric-Pressure Microplasma Jet
    Doherty, Kyle G.
    Oh, Jun-Seok
    Unsworth, Paul
    Bowfield, Andrew
    Sheridan, Carl M.
    Weightman, Peter
    Bradley, James W.
    Williams, Rachel L.
    PLASMA PROCESSES AND POLYMERS, 2013, 10 (11) : 978 - 989
  • [24] Ultrahigh-speed etching of organic films using microwave-excited nonequilibrium atmospheric-pressure plasma
    Yamakawa, K
    Hori, M
    Goto, T
    Den, S
    Katagiri, T
    Kano, H
    JOURNAL OF APPLIED PHYSICS, 2005, 98 (04)
  • [25] Synthesis of silicon nanocones using rf microplasma at atmospheric pressure
    Shirai, H
    Kobayashi, T
    Hasegawa, Y
    APPLIED PHYSICS LETTERS, 2005, 87 (14) : 1 - 3
  • [26] Growth of vertically aligned carbon nanotube bundles using atmospheric-pressure microplasma
    Yoshiki, Hiroyuki
    Orada, Takeru
    Hirai, Kazuhiko
    Hatakeyama, Rikizo
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2006, 45 (12): : 9276 - 9279
  • [27] Growth of vertically aligned carbon nanotube bundles using atmospheric-pressure microplasma
    Yoshiki, Hiroyuki
    Okada, Takeru
    Hirai, Kazuhiko
    Hatakeyama, Rikizo
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (12): : 9276 - 9279
  • [28] Atmospheric-Pressure Microplasma Jets From Linear Arrays of Hollow-Core Optical Fibers for Biomedical Applications
    Kim, Jae Young
    Ballato, John
    Foy, Paul
    Hawkins, Thomas
    Kim, Sung-O
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2011, 39 (11) : 2958 - 2959
  • [29] Back-side Thinning of Silicon Carbide Wafer by Plasma Etching using Atmospheric-pressure Plasma
    Sano, Yasuhisa
    Aida, Kohei
    Nishikawa, Hiroaki
    Yamamura, Kazuya
    Matsuyama, Satoshi
    Yamauchi, Kazuto
    PROCEEDINGS OF PRECISION ENGINEERING AND NANOTECHNOLOGY (ASPEN2011), 2012, 516 : 108 - +
  • [30] Localized high-rate deposition of zinc oxide films at atmospheric pressure using inductively coupled microplasma
    Stauss, Sven
    Imanishi, Yasuo
    Miyazoe, Hiroyuki
    Terashima, Kazuo
    THIN SOLID FILMS, 2010, 518 (19) : 5391 - 5395
12345