Improvement of crystalline quality in GaN films by air-bridged lateral epitaxial growth

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作者：
Kidoguchi, Isao [1 ]
Ishibashi, Akihiko [1 ]
Sugahara, Gaku [1 ]
Tsujimura, Ayumu [1 ]
Ban, Yuzaburoh [1 ]
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[1] Matsushita Electric Industrial Co, Ltd, Osaka, Japan
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| 1600年 / JJAP, Tokyo卷 / 39期
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