Improvement of crystalline quality in GaN films by air-bridged lateral epitaxial growth

被引：0

作者：

Kidoguchi, Isao ^{[1
]}

Ishibashi, Akihiko ^{[1
]}

Sugahara, Gaku ^{[1
]}

Tsujimura, Ayumu ^{[1
]}

Ban, Yuzaburoh ^{[1
]}

机构：

[1] Matsushita Electric Industrial Co, Ltd, Osaka, Japan

来源：

| 1600年 / JJAP, Tokyo卷 / 39期

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[1] Improvement of crystalline quality in GaN films by air-bridged lateral epitaxial growth
Kidoguchi, I
Ishibashi, A
Sugahara, G
Tsujimura, A
Ban, Y
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[2] High-quality GaN films obtained by air-bridged lateral epitaxial growth
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Ban, Y
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[3] Air-bridged lateral epitaxial overgrowth of GaN thin films
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Ishibashi, A
Sugahara, G
Ban, Y
APPLIED PHYSICS LETTERS, 2000, 76 (25) : 3768 - 3770
[4] FEM deformation analysis of Air-Bridged Lateral Epitaxial grown GaN films
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[5] Study on deformations and stress distributions in air-bridged lateral-epitaxial-grown GaN films
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[6] Recombination dynamics in GaN and InGaN/GaN multiple quantum wells on air-bridged lateral epitaxial grown GaN layers
Izumi, T
Inoue, K
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Kawakami, Y
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Kidoguchi, I
Ban, Y
PROCEEDINGS OF THE INTERNATIONAL WORKSHOP ON NITRIDE SEMICONDUCTORS, 2000, 1 : 599 - 602
[7] Low-dislocation density AlGaN layer by air-bridged lateral epitaxial growth
Kawaguchi, Y
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Mochida, A
Shimamoto, T
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Yokogawa, T
5TH INTERNATIONAL CONFERENCE ON NITRIDE SEMICONDUCTORS (ICNS-5), PROCEEDINGS, 2003, 0 (07): : 2107 - 2110
[8] Optical properties of InGaN based multiple quantum wells on low threading dislocation density GaN films fabricated by air-bridged lateral epitaxial growth
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Sugahara, G
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Taguchi, T
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5TH INTERNATIONAL CONFERENCE ON NITRIDE SEMICONDUCTORS (ICNS-5), PROCEEDINGS, 2003, 0 (07): : 2116 - 2119
[9] Spatially resolved cathodoluminescence study on AlGaN layer fabricated by air-bridged lateral epitaxial growth
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PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2004, 241 (12): : 2730 - 2734
[10] Reduction of leakage current of p-n junction by using air-bridged lateral epitaxial growth technique
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5TH INTERNATIONAL CONFERENCE ON NITRIDE SEMICONDUCTORS (ICNS-5), PROCEEDINGS, 2003, 0 (07): : 2494 - 2497

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