Thermal redistribution of Al implanted in Si: evidences for interactions with extended defects

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作者：
Ortiz, Ch. [1 ]
Grob, J.J. [1 ]
Mathiot, D. [1 ]
Claverie, A. [1 ]
Dubois, Ch. [1 ]
Jerisian, R. [1 ]
机构：
[1] Lab PHASE-CNRS, Strasbourg, France
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1999年 / 147卷 / 1-4期
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页码：122 / 126
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