Atomic layer epitaxy of III-V compounds in a hydride vapor phase system

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作者：

机构：

[1] Ahopelto, J.

[2] Kattelus, H.P.

[3] Saarilahti, J.

[4] Suni, I.

来源：

Ahopelto, J. | 1600年 / 99期

关键词：

Atomic Layer Epitaxy - Organometallic Vapor Phase Epitaxy;

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暂无

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[31] COMPARISON OF LIQUID-PHASE EPITAXY AND CHEMICAL VAPOR EPITAXY OF III-V COMPOUND SEMICONDUCTORS
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