Deposition of ZnO thin films on LiNbO3 substrates using sputtering technique

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作者：
Yamamoto, Hideki [1 ]
Saiga, Noriaki [1 ]
Nishimori, Katsumi [2 ]
机构：
[1] Dept. of Electron. Contr. Eng., Yonago Natl. College of Technology, 4448 Hikona, Yonago, Tottori 683-8502, Japan
[2] Dept. of Elec. and Electron. Eng., Faculty of Engineering, Tottori University, Koyama, Tottori 680-8552, Japan
来源：
Shinku/Journal of the Vacuum Society of Japan | 1999年 / 42卷 / 03期
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页码：163 / 166
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