Focal photodetector arrays based on CdHgTe heteroepitaxial layers grown by molecular-beam epitaxy on GaAs substrates

被引:0
|
作者
Vasil'ev, V.V. [1 ]
Voinov, V.G. [1 ]
Esaev, D.G. [1 ]
Zakhar'yash, T.I. [1 ]
Klimenko, A.G. [1 ]
Kozlov, A.I. [1 ]
Krymskii, A.I. [1 ]
Marchishin, I.V. [1 ]
Ovsyuk, V.N. [1 ]
Romashko, L.N. [1 ]
Svitashev, K.K. [1 ]
Suslyakov, A.O. [1 ]
Talipov, N.Kh. [1 ]
Sidorov, Yu.G. [1 ]
Varavin, V.C. [1 ]
机构
[1] Russian Acad of Sciences, Novosibirsk, Russia
关键词
Cold welding - Heterojunctions - Molecular beam epitaxy - Multiplexing equipment - Photosensitivity - Semiconducting cadmium compounds - Semiconducting gallium arsenide - Semiconductor device manufacture - Semiconductor diodes - Semiconductor growth - Substrates;
D O I
暂无
中图分类号
学科分类号
摘要
This paper describes a technology for fabricating photodetector arrays with a 32×32 and 128×128 format, based on HgCdTe/CdTe/GaAs heterostructure diodes grown by molecular-beam epitaxy. The technology is demonstrated for hybrid assembly with a multiplexer with continuous monitoring of the process of cold welding of indium posts. The threshold power of the elements of a photodetector device with a 128×128 format with a long-wavelength photosensitivity limit of 10.4 and 5.2 μm equals 1.7×10-13 and 1.1×10-14 W/Hz1/2, respectively. The noise-equivalent temperature difference in the frame field equalled 0.077 K when the background temperature was 293 K.
引用
收藏
页码:68 / 72
相关论文
共 50 条
  • [1] Focal photodetector arrays based on CdHgTe heteroepitaxial layers grown by molecular-beam epitaxy on GaAs substrates
    Vasil'ev, VV
    Voinov, VG
    Esaev, DG
    Zakhar'yash, TI
    Klimenko, AG
    Kozlov, AI
    Krymskii, AI
    Marchishin, IV
    Ovsyuk, VN
    Romashko, LF
    Svitashev, KK
    Suslyakov, AO
    Talipov, NK
    Sidorov, YG
    Varavin, VC
    Dvoretskii, SA
    Mikhailov, NN
    JOURNAL OF OPTICAL TECHNOLOGY, 1998, 65 (01) : 68 - 72
  • [2] Acceptor states in heteroepitaxial CdHgTe films grown by molecular-beam epitaxy
    Mynbaev, K. D.
    Shilyaev, A. V.
    Bazhenov, N. L.
    Izhnin, A. I.
    Izhnin, I. I.
    Mikhailov, N. N.
    Varavin, V. S.
    Dvoretsky, S. A.
    SEMICONDUCTORS, 2015, 49 (03) : 367 - 372
  • [3] Acceptor states in heteroepitaxial CdHgTe films grown by molecular-beam epitaxy
    K. D. Mynbaev
    A. V. Shilyaev
    N. L. Bazhenov
    A. I. Izhnin
    I. I. Izhnin
    N. N. Mikhailov
    V. S. Varavin
    S. A. Dvoretsky
    Semiconductors, 2015, 49 : 367 - 372
  • [4] Photoreceivers on the base of CdHgTe layers grown by the method of molecular-beam epitaxy
    Vasil'ev, V.V. (vas@thermo.isp.nsc.ru), 2001, Izdatel'stvo SO RAN
  • [5] INVESTIGATION OF INAS LAYERS GROWN BY MOLECULAR-BEAM EPITAXY ON (100) GAAS SUBSTRATES
    DVORYANKINA, GG
    DVORYANKIN, VF
    PETROV, AG
    KUDRYASHOV, AA
    POROTIKOV, AP
    VARAKSIN, GA
    KHUSID, LB
    INORGANIC MATERIALS, 1987, 23 (11) : 1569 - 1574
  • [6] Molecular-beam epitaxy of BeTe layers on GaAs substrates
    Tournié, E
    Bousquet, V
    Faurie, JP
    JOURNAL OF CRYSTAL GROWTH, 1999, 201 : 494 - 497
  • [7] Molecular-beam epitaxy of BeTe layers on GaAs substrates
    Tournié, E.
    Bousquet, V.
    Faurie, J.-P.
    Journal of Crystal Growth, 1999, 201 : 494 - 497
  • [8] PHOTOLUMINESCENCE IN CDTE GROWN ON GAAS SUBSTRATES BY MOLECULAR-BEAM EPITAXY
    LEOPOLD, DJ
    BALLINGALL, JM
    WROGE, ML
    APPLIED PHYSICS LETTERS, 1986, 49 (21) : 1473 - 1474
  • [9] CDHGTE BRAGG REFLECTORS GROWN BY MOLECULAR-BEAM EPITAXY
    BLEUSE, J
    MAGNEA, N
    JOUNEAU, PH
    MARIETTE, H
    JOURNAL OF CRYSTAL GROWTH, 1993, 127 (1-4) : 375 - 378
  • [10] DEEP STATES IN GAAS(IN) LAYERS GROWN BY MOLECULAR-BEAM EPITAXY
    HUANG, YJ
    IOANNOU, DE
    ILIADIS, A
    JOURNAL OF ELECTRONIC MATERIALS, 1988, 17 (04) : S31 - S31