Adsorption of atomic hydrogen on Ag-covered 6H-SiC(0001) surface

被引：0
|
作者：
Fujino, Toshiaki [1 ]
Fuse, Takashi [1 ]
Ryu, Jeong-Tak [1 ]
Inudzuka, Katsuhiko [1 ]
Yamazaki, Yujin [1 ]
Katayama, Mitsuhiro [1 ]
Oura, Kenjiro [1 ]
机构：
[1] Department of Electronic Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2000年 / 39卷 / 7 B期
关键词：
Annealing - Crystal orientation - Crystalline materials - Gas adsorption - Hydrogen - Low energy electron diffraction - Silver - Spectroscopic analysis - Surface structure - Vacuum;
D O I：
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中图分类号：
学科分类号：
摘要：
We have investigated atomic hydrogen (H) adsorption on an Ag-covered 6H-SiC(0001) surface, using coaxial impactcollision ion-scattering spectroscopy (CAICISS) and time-of-flight elastic recoil detection analysis (TOF-ERDA). It has been revealed that the two-dimensional (2D) layer of Ag on the 6H-SiC(0001) surface is changed to three-dimensional (3D) islands by the adsorption of H on the surface. The 3D Ag islands have an Ag(111) crystalline structure. When this surface is annealed at 550 °C, the 3D Ag islands do not revert to a 2D layer but desorb from the surface together with H.
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页码：4340 / 4342
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