Optical properties of ZnO thin films deposited by dc reactive magnetron sputtering

被引：0
|
作者：
Meng, Li-Jian [1 ]
Andritschky, M. [1 ]
dos Santos, M.P. [1 ]
机构：
[1] Univ of Minho, Braga, Portugal
来源：
Vacuum | 1993年 / 44卷 / 02期
关键词：
Reactive magnetron sputtering - Zincoxide;
D O I：
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学科分类号：
摘要：
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页码：105 / 109
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