Preparation of nanoporous silica films with low dielectric constant

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作者：
Wang, Juan
Zhang, Changrui
Feng, Jian
机构：
[1] State Key Lab of Novel Ceramic Fibers and Composites, National Univ. of Defense Technology, Changsha 410073, China
[2] State Key Lab of Novel Ceramic Fibers and Composites, College of Aerospace and Material Engineering, National Univ. of Defense Technology, Changsha 410073, China
来源：
Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering | 2004年 / 33卷 / SUPPL. 3期
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