Preparation of nanoporous silica films with low dielectric constant

被引：0
|
作者：
Wang, Juan
Zhang, Changrui
Feng, Jian
机构：
[1] State Key Lab of Novel Ceramic Fibers and Composites, National Univ. of Defense Technology, Changsha 410073, China
[2] State Key Lab of Novel Ceramic Fibers and Composites, College of Aerospace and Material Engineering, National Univ. of Defense Technology, Changsha 410073, China
来源：
Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering | 2004年 / 33卷 / SUPPL. 3期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] Preparation of nanoporous silica films with low dielectric constant
    Wang, J
    Zhang, CR
    Feng, H
    RARE METAL MATERIALS AND ENGINEERING, 2004, 33 : 141 - 144
  • [2] Low Dielectric Constant Nanoporous Silica Films
    Shen Jun
    Zhu Yumei
    Lin Xuejing
    Wu Guangming
    Zhou Bin
    Ni Xingyuan
    Yao Lanfang
    Wang Guoqing
    Wang Peiqing
    Wang Qingfeng
    Niu Xixian
    RARE METAL MATERIALS AND ENGINEERING, 2010, 39 : 31 - 35
  • [3] Low Dielectric Constant and Hydrophobic Nanoporous Silica Films
    Shen Jun
    Zhu Yumei
    Lin Xuejing
    Wu Guangming
    Zhou Bin
    Ni Xingyuan
    Yao Lanfang
    Wang Guoqing
    Wang Peiqing
    Wang Qingfeng
    Niu Xixian
    2008 2ND IEEE INTERNATIONAL NANOELECTRONICS CONFERENCE, VOLS 1-3, 2008, : 924 - +
  • [4] Low dielectric constant silica films with ordered nanoporous structure
    Shen, Jun
    Luo, Aiyun
    Yao, Lanfang
    Lin, Xuejin
    Zhou, Bin
    Wu, Guangming
    Ni, Xingyuan
    MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 2007, 27 (5-8): : 1145 - 1148
  • [5] A theoretical model on pore size distribution in low dielectric constant nanoporous silica films
    Hsu, JP
    Hung, SH
    Chen, WC
    THIN SOLID FILMS, 2005, 473 (02) : 185 - 190
  • [6] Sol-gel processing of low dielectric constant nanoporous silica thin films
    Kim, DY
    Du, H
    Bhandarkar, S
    Johnson, DW
    NANOPHASE AND NANOCOMPOSITE MATERIALS IV, 2002, 703 : 147 - 152
  • [7] Preparation of organic silica films with low dielectric constant from the liquid phase
    Usami, K
    Sumimura, K
    Matsumura, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1998, 37 (4A): : L420 - L422
  • [8] Characterization of nanoporous low dielectric constant thin films.
    Huang, QR
    Frank, CW
    Mecerreyes, D
    Miller, RD
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2001, 221 : U424 - U424
  • [9] Preparation of porous silica ceramics with low dielectric constant
    Mao, Xiao-Jian
    Wang, Shi-Wei
    Shimai, Shun-Zo
    Chinese Journal of Aeronautics, 2006, 19 (SUPPL.):
  • [10] Preparation of Porous Silica Ceramics with Low Dielectric Constant
    MAO Xiao-jiana
    Chinese Journal of Aeronautics, 2006, (S1) : 239 - 243
12345