ELECTROCHEMICAL C-V METHOD FOR DETERMINATION OF SEMICONDUCTOR IMPURITY PROFILE.

被引：0
|
作者：
Shao Yongfu
Chen Ziyao
Peng Ruiwa
机构：
来源：
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors | 1982年 / 3卷 / 03期
关键词：
SEMICONDUCTOR IMPURITY PROFILE;
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学科分类号：
摘要：
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页码：215 / 221
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