ELECTRICAL PROPERTIES OF TITANIUM NITRIDE THIN FILMS.

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作者：
Kawabata, Keishi
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来源：
Transactions of the Institute of Electronics and Communication Engineers of Japan. Section E | 1983年 / E66卷 / 08期
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TN [电子技术、通信技术];
学科分类号：
0809 ;
摘要：
This paper deals with studies of TiN thin film on its electrical properties and stability for the purpose to clarifying the practicability of sputtered TiN films for resistive elements. In this experiment the relationship between the sheet resistance and TCR was studied. In order to clear up the thermal aging process, the TiN film was heated at several temperatures in air and the aging effect was studied.
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页码：488 / 492
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