ELECTRICAL PROPERTIES OF TITANIUM NITRIDE THIN FILMS.

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Kawabata, Keishi
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TN [电子技术、通信技术];
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0809 ;
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This paper deals with studies of TiN thin film on its electrical properties and stability for the purpose to clarifying the practicability of sputtered TiN films for resistive elements. In this experiment the relationship between the sheet resistance and TCR was studied. In order to clear up the thermal aging process, the TiN film was heated at several temperatures in air and the aging effect was studied.
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页码:488 / 492
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