Stoichiometry of Ta-N film and its application for diffusion barrier in the Al3Ta/Ta-N/Si contact system

被引：0
|
作者：
机构：
[1] Sasaki, Katsutaka
[2] Noya, Atsushi
[3] Umezawa, Toshiji
来源：
Sasaki, Katsutaka | 1600年 / 29期
关键词：
Semiconducting Silicon;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] STOICHIOMETRY OF TA-N FILM AND ITS APPLICATION FOR DIFFUSION BARRIER IN THE AL3TA/TA-N/SI CONTACT SYSTEM
    SASAKI, K
    NOYA, A
    UMEZAWA, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 (06): : 1043 - 1047
  • [2] Electrical and structural properties of Ta-N thin film and Ta/Ta-N multilayer for embedded resistor
    Na, Suok-Min
    Park, In-Soo
    Park, Se-Young
    Jeong, Geun-Hee
    Suh, Su-Jeong
    THIN SOLID FILMS, 2008, 516 (16) : 5465 - 5469
  • [3] Fabrication and diffusion barrier properties of nanoscale Ta/Ta-N bi-layer
    Zhou, Ji-cheng
    Li, You-zhen
    Huang, Di-hui
    JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2009, 209 (02) : 774 - 778
  • [4] SUPERCONDUCTING PROPERTIES OF TA-N
    DELILLO, S
    MANCINI, F
    PHYSICS LETTERS A, 1976, 59 (04) : 297 - 298
  • [5] PHASE RELATION OF Ta-N SYSTEM.
    Koyama, Takashi
    Kieda, Nobuo
    Uematsu, Keizo
    Mizutatni, Noboyasu
    Kato, Masanori
    1984, (92):
  • [6] Failure mechanism of amorphous and crystalline Ta-N films in the Cu/Ta-N/Ta/SiO2 structure
    Chang, CC
    Chen, JS
    Hsu, WS
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2004, 151 (11) : G746 - G750
  • [7] Non-metal diffusion coefficients for the Ta-C and Ta-N systems
    Rafaja, D
    Lengauer, W
    Wiesenberger, H
    ACTA MATERIALIA, 1998, 46 (10) : 3477 - 3483
  • [8] Tribological properties of Ta-C-N and Ta-N thin films
    Yan, X. H.
    Yin, J.
    Cheng, X. N.
    Liu, J. Q.
    MATERIALWISSENSCHAFT UND WERKSTOFFTECHNIK, 2013, 44 (01) : 79 - 83
  • [9] Auger electron spectroscopy study on the stability and the interfacial reaction of Ta, Ta-N and TaN films as a diffusion barrier between Cu9Al4 film and Si
    Noya, Atsushi
    Sasaki, Katsutaka
    Takeyama, Mayumi
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1993, 32 (02): : 911 - 915
  • [10] Analysis of the phase diagram and thermochemistry in the Ta-N and the Ta-C-N systems
    Frisk, K
    JOURNAL OF ALLOYS AND COMPOUNDS, 1998, 278 (1-2) : 216 - 226
12345