Properties of reactively sputtered tin oxide films as CO gas sensors

被引：0
|
作者：
Di, Ginlio, M.
Micocci, G.
Rella, R.
Sicilliano, P.
Tepore, A.
机构：
来源：
Sensors and Actuators, B: Chemical | 1995年 / B23卷 / 2-3期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [31] INVESTIGATION OF TIN FILMS REACTIVELY SPUTTERED USING A SPUTTER GUN
    AHN, KY
    WITTMER, M
    TING, CY
    THIN SOLID FILMS, 1983, 107 (01) : 45 - 54
  • [32] ION BEAM MODIFICATION OF REACTIVELY SPUTTERED TiN THIN FILMS
    Popovic, M.
    Novakovic, M.
    Milosavljevic, M.
    Perusko, D.
    Milinovic, V.
    Radovic, I.
    Bibic, N.
    24TH SUMMER SCHOOL AND INTERNATIONAL SYMPOSIUM ON THE PHYSICS OF IONIZED GASES, CONTRIBUTED PAPERS, 2008, (84): : 205 - 208
  • [33] PROPERTIES OF REACTIVELY-SPUTTERED COPPER-OXIDE THIN-FILMS
    DROBNY, VF
    PULFREY, DL
    THIN SOLID FILMS, 1979, 61 (01) : 89 - 98
  • [34] ELECTRICAL AND OPTICAL-PROPERTIES OF REACTIVELY SPUTTERED TUNGSTEN-OXIDE FILMS
    MIYAKE, K
    KANEKO, H
    TERAMOTO, Y
    JOURNAL OF APPLIED PHYSICS, 1982, 53 (03) : 1511 - 1515
  • [35] Electrical properties of reactively sputtered CNx films
    Monclus, MA
    Cameron, DC
    Chowdhurry, AKMS
    THIN SOLID FILMS, 1999, 341 (1-2) : 94 - 100
  • [36] Electrical properties of reactively sputtered CNx films
    Monclus, M.A.
    Cameron, D.C.
    Chowdhurry, A.K.M.S.
    Thin Solid Films, 1999, 341 (01): : 94 - 100
  • [37] Preparation of tin oxide films for micro gas sensors
    Inst of Electronics, Chinese Acad of Sciences, Beijing, China
    Zhenkong Kexue yu Jishu Xuebao/Vacuum Science and Technology, 2000, 20 (03): : 161 - 165
  • [38] Nitrogen doping of reactively sputtered tungsten oxide films
    Paluselli, D
    Marsen, B
    Miller, EL
    Rocheleau, RE
    ELECTROCHEMICAL AND SOLID STATE LETTERS, 2005, 8 (11) : G301 - G303
  • [39] Gas-sensing Property Evaluation of Reactively Sputtered Chromium Oxide Thin Films
    Oros, C.
    Wisitsoraat, A.
    Limsuwan, P.
    Horpathum, M.
    Patthanasettakul, V.
    Tuantranont, A.
    SMART MATERIALS, 2008, 55-57 : 285 - +
  • [40] Sputtered nickel oxide films for NO2 gas sensors
    Reddy, A. Mallikarjuna
    Reddy, A. Sivasankar
    Reddy, P. Sreedhara
    ADVANCES IN NANOSCIENCE AND NANOTECHNOLOGY, 2013, 678 : 361 - +
12345