PROPERTIES OF REACTIVELY-SPUTTERED COPPER-OXIDE THIN-FILMS

被引：209

|

作者：

DROBNY, VF

PULFREY, DL

机构：

来源：

THIN SOLID FILMS | 1979年 / 61卷 / 01期

关键词：

D O I：

10.1016/0040-6090(79)90504-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

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页码：89 / 98

页数：10

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