Nano- and micro-technology applications of focused ion beam processing

被引：0
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作者：
Moore, D.F.
Daniel, J.H.
Walker, J.F.
机构：
[1] Cambridge Univ. Eng. Department, Trumpington Street, Cambridge CB2 1PZ, United Kingdom
[2] FEI Europe Ltd., Cottenham, Cambridge CB4 4PS, United Kingdom
来源：
Microelectronics Journal | 1997年 / 28卷 / 4 SPEC. ISS.期
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页码：465 / 473
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